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Hydrogenation studies in p-GaAs

U P Singh and P C Srivastava

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Hydrogenation studies in p-GaAs have been performed by fabricating Pd/p-GaAs devices. The devices have been studied by I-V and C-V measurements. Hydrogenation has been found to improve the ideality factor of the diode. The forward C-V characteristics have shown the presence of interfacial deep donors at and , the density of which decreased on hydrogenation. The content of hydrogen in Pd/p-GaAs has been measured both in the semiconducting substrates and the palladium thin film by ERDA using 55 MeV Si ions.


PACS

85.30.De Semiconductor-device characterization, design, and modeling

85.30.Kk Junction diodes

82.80.Yc Rutherford backscattering (RBS), and other methods of chemical analysis

82.65.+r Surface and interface chemistry; heterogeneous catalysis at surfaces

Subjects

Electronics and devices

Semiconductors

Surfaces, interfaces and thin films

Chemical physics and physical chemistry

Dates

Issue 10 (October 1998)

Received 11 November 1997, accepted for publication 3 June 1998



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