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Direct and inverse problems related to MEMS

Daniele Cassani1, Barbara Kaltenbacher2 and Alfredo Lorenzi1

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This paper deals with direct and inverse evolution problems which come up in studying micro-electro-mechanical-systems: here we consider a nonlinear and nonlocal MEMS model. The inverse problem consists of recovering a time-varying Coulomb potential by exploiting some accessible measurements, which depend on the dynamic displacement of the system. Local existence, uniqueness and continuous dependence results are proved for both direct and inverse problems.


PACS

85.85.+j Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

02.60.Nm Integral and integrodifferential equations

02.60.Lj Ordinary and partial differential equations; boundary value problems

02.30.Zz Inverse problems

MSC

65N21 Inverse problems

45K05 Integro-partial differential equations (See also 34K30, 35R10, 47G20)

35R30 Inverse problems (undetermined coefficients, etc.) for PDE

Subjects

Mathematical physics

Computational physics

Electronics and devices

Nanoscale science and low-D systems

Dates

Issue 10 (October 2009)

Received 23 April 2009, in final form 19 June 2009

Published 16 September 2009



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