Yang Jin et al 2006 Chinese Phys. Lett. 23 2838 doi:10.1088/0256-307X/23/10/058
Yang Jin, Zhang Xue-Hua, Cao Meng, Wang Ming-Xia, Liang Jin-Ling and Li De-Jun
Show affiliationsZrC/ZrB2 multilayered coatings with bilayer periods of 3.5–40 nm are synthesized by rf magnetron sputtering. Analyses of x-ray diffraction, scanning electron microscopy and nanoindentation indicate that multilayered coatings possess much higher hardness and greater fracture resistance than monolithic ZrC and ZrB2 coatings. A maximum hardness (41.7 GPa) and a critical fracture load (73.7 mN) are observed in the multilayer with Λ = 32 nm deposited at the substrate bias -40 V. Higher residual stress built in the ZrC layer can be released by periodic insertion of ZrB2 into the ZrC layer. A clear multilayered structure with mixed ZrB2(001), ZrB2 (002) and ZrC (111) orientations should be responsible for the enhanced mechanical properties.
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
62.25.-g Mechanical properties of nanoscale systems
Surfaces, interfaces and thin films
Issue 10 (October 2006)
Received 24 July 2006
Yang Jin et al 2006 Chinese Phys. Lett. 23 2838
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