Duan Zhi-Hui et al 2003 Chinese Phys. Lett. 20 2130 doi:10.1088/0256-307X/20/12/012
Duan Zhi-Hui1, Zhang Qing-Chuan1,3, Wu Xiao-Ping1, Pan Liang1, Chen Da-Peng2, Wang Wei-Bing2 and Guo Zhe-Ying1
Show affiliationsWe develop an uncooled infrared imaging device that contains a SiN–Au bimaterial micro-cantilever arrays detector and an optical read-out section. The detector converts the incident infrared radiation to the cantilever inclination angles, and the optical read-out section converts these angles directly to a visible image through an optical filtering operation to the spectra of the cantilever arrays with a knife-edge filter. The present results with the 140×98 cantilever arrays and the 8-bit A/D quantizer suggest that the objects at the temperature of 250°C at the distance as far as 1 m can be detected and the noise-equivalent temperature difference (NETD) of the device is about 10 K. The further improvement of NETD is expected to approach about 14 mK with the optimized cantilever design and 12-bit quantizer.
42.70.Ln Holographic recording materials; optical storage media
42.30.-d Imaging and optical processing
07.57.Kp Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors
Issue 12 (December 2003)
Received 4 August 2003
Duan Zhi-Hui et al 2003 Chinese Phys. Lett. 20 2130
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