Kyung Joong Kim et al 2010 Metrologia 47 08011 doi:10.1088/0026-1394/47/1A/08011
Kyung Joong Kim1, Jeong Won Kim1, Dae Won Moon1, Thomas Wirth2, Vasile-Dan Hodoroaba2, Thomas Gross2, Wolfgang E S Unger2, Werner Jordaan3, Martin Van Staden3, Sara Prins3, Hai Wang4, Xiaoping Song4, Lulu Zhang5, Toshiyuki Fujimoto5 and Isao Kojima5
Show affiliationsThe Key Comparison K67 and the parallel Pilot Study P108 on quantitative analysis of thin alloy films have been completed in the Surface Analysis Working Group (SAWG) of the Consultative Committee for Amount of Substance (CCQM). The aim of these inter-laboratory comparisons is to determine the degree of equivalence in the measurement capability of national metrology institutes (NMIs) and designated institutes (DIs) for the determination of the composition of thin alloy films. The measurand is expressed in atomic percent. A Fe–Ni alloy film with a certified composition was available for the participants of the inter-laboratory comparison. It has been used as a reference specimen to determine the relative sensitivity factors (RSF) of Fe and Ni for the different analytical methods used by the participants to determine the composition of the test sample. As was shown in the preceding Pilot Study P98, the degrees of equivalence in the measurement capabilities of the participants can be improved in that way. The composition of the reference specimen was certified by inductively coupled plasma mass spectrometry (ICP-MS) using the isotope dilution method. The in-depth and lateral homogeneity, determined in terms of elemental composition, of the certified reference sample and the unknown test sample were confirmed by secondary ion mass spectrometry (SIMS) using C60 primary ions by the leading laboratory. Five laboratories participated in the key comparison. Four of them used x-ray photoelectron spectroscopy (XPS) and one Auger electron spectroscopy (AES). One laboratory participated in the parallel P108 pilot study using electron probe micro analysis with an energy-dispersive spectrometer (ED EPMA) and XPS.
Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/.
The final report has been peer-reviewed and approved for publication by the CCQM, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).
Issue 1A (Technical Supplement 2010)
Kyung Joong Kim et al 2010 Metrologia 47 08011
Th Bruns 2010 Metrologia 47 09001
L A Konopelko et al 2010 Metrologia 47 08010
R Goebel et al 2008 Metrologia 45 01004
Pierre Otal et al 2008 Metrologia 45 07004