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Report on an international comparison of one-dimensional (1D) grating pitch

Jennifer E Decker1, E Buhr2, A Diener2, B Eves1, A Kueng3, F Meli3, J R Pekelsky1, S-P Pan4 and B-C Yao4

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SUPPLEMENTARY COMPARISON

This paper reports results of an international comparison of one-dimensional (1D) grating pitch calibration by optical diffraction. Comparison results are analysed and discussed following the recommended guidelines for the analysis of CIPM key comparisons.

Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/.

The final report has been peer-reviewed and approved for publication by SIM, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).


Dates

Issue 1A ( 1 January 2009)



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