Youichi Bitou et al 2008 Metrologia 45 21 doi:10.1088/0026-1394/45/1/004
Youichi Bitou, Toshiyuki Takatsuji and Kensei Ehara
Show affiliationsA simple method of evaluating the measurement capability of a practical Fizeau-type flatness measurement machine is proposed. In this method, by measuring only the peak-to-valley (PV) value of a calibrated test flat, the measurement capability of the flatness measurement machine for the PV value is evaluated while maintaining the traceability of the measurement. A simple approximate equation for estimating the measurement capability of the flatness measurement machine is presented.
06.20.Dk Measurement and error theory
89.20.Bb Industrial and technological research and development
Issue 1 (February 2008)
Received 10 July 2007
Published 18 December 2007
Youichi Bitou et al 2008 Metrologia 45 21
Stéphane Nonnenmacher 2008 Nonlinearity 21 T113
E Massa et al 2009 Metrologia 46 249
J Silva Lobo and R S Ward 2009 J. Phys. A: Math. Theor. 42 482001
Abhay Ashtekar 2009 J. Phys.: Conf. Ser. 189 012003
S Datta 1990 J. Phys.: Condens. Matter 2 8023
Margareta Wallquist et al 2008 New J. Phys. 10 063005
R G Caro et al 1982 J. Phys. D: Appl. Phys. 15 767
Michael Blank et al 2002 Nonlinearity 15 1905
John Collins JHEP05(2000)004