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Simple uncertainty evaluation method for an interferometric flatness measurement machine using a calibrated test flat

Youichi Bitou, Toshiyuki Takatsuji and Kensei Ehara

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A simple method of evaluating the measurement capability of a practical Fizeau-type flatness measurement machine is proposed. In this method, by measuring only the peak-to-valley (PV) value of a calibrated test flat, the measurement capability of the flatness measurement machine for the PV value is evaluated while maintaining the traceability of the measurement. A simple approximate equation for estimating the measurement capability of the flatness measurement machine is presented.


PACS

06.20.Dk Measurement and error theory

89.20.Bb Industrial and technological research and development

07.60.Ly Interferometers

Subjects

Instrumentation and measurement

Dates

Issue 1 (February 2008)

Received 10 July 2007

Published 18 December 2007



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