Min-Seok Kim et al 2006 Metrologia 43 389 doi:10.1088/0026-1394/43/5/008
Min-Seok Kim1, Jae-Hyuk Choi, Yon-Kyu Park and Jong-Ho Kim
Show affiliationsMotivated by emerging needs for accurate force measurements in the nanotechnology and biophysics areas, we present an atomic force microscope (AFM) cantilever calibration system, the 'nano force calibrator' (NFC), consisting of a microbalance and a precision translation stage. Calibration using the NFC has proved to be a reliable and accurate method through a series of experiments with a commercial piezoresistive AFM cantilever. In these experiments, linearity, repeatability and reproducibility of measurements were investigated along with the effects of calibration conditions, such as orientation of the cantilever and temperature. Uncertainty analysis shows that the stiffness and force sensitivity are determined to be 3.385 N m−1 and 0.6490 µN Ω−1, which are traceable to the Système International d'Unités (SI units). The relative standard uncertainties of both the stiffness and sensitivity are approximately 0.4% or conservatively 0.5%.
07.79.Lh Atomic force microscopes
Issue 5 (October 2006)
Received 8 February 2006
Published 6 September 2006
Min-Seok Kim et al 2006 Metrologia 43 389
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