L Koenders et al 2003 Metrologia 40 04001 doi:10.1088/0026-1394/40/1A/04001
L Koenders1, R Bergmans2, J Garnaes3, J Haycocks4, N Korolev5, T Kurosawa6, F Meli7, B C Park8, G S Peng9, G B Picotto10, E Prieto11, S Gao12, B Smereczynska13, T Vorburger14 and G Wilkening1
Show affiliationsThe ability to measure step height and to calibrate step height artefacts is of vital interest in nanometrology. On that score the WGDM7 decided in 1998 to include measurements of step heights in a series of comparisons on the field of nanometrology.
The comparison about step height (NANO2) started in September 2000 with the Physikalisch-Technische Bundesanstalt (PTB) as pilot laboratory. Fourteen national metrology institutes worldwide participated in this comparison. A set of five step height standards in the range from 7 nm to 800 nm was used for the comparison. The lateral size of the structures of the step height standards was chosen so that the height could be measured by different types of instruments, for example, interference microscopes, stylus instruments and scanning probe microscopes (SPM). The reference values were calculated as the weighted mean of all measurements that fulfilled the En < 1 criteria.
Most of the results were in good agreement with the reference values. It is noticeable that the results obtained by different types of instruments are quite compatible. Also this comparison is the first comprehensive test of the reliability of SPM and their suitability for traceable measurements of step heights. Further it was shown that today step heights on samples can be measured with uncertainties in the sub-nanometre range. Differences in the calculation of the uncertainty depend on the types of instruments and on the users. For each class of instrument, e.g. SPM, it would be meaningful to homogenise these models. Hence the results of this comparison are of great importance in many respects.
Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/.
The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the Mutual Recognition Arrangement (MRA).
Issue 1A (Technical Supplement 2003)
L Koenders et al 2003 Metrologia 40 04001
L Koenders et al 2006 Metrologia 43 04001
Jiri Mokros 2005 Metrologia 42 04001
Miguel Viliesid 2009 Metrologia 46 04003
O A Kruger 2009 Metrologia 46 04004
Andrew Lewis and Nicola Testa 2009 Metrologia 46 04002
L Koenders et al 2004 Metrologia 41 04001
Otto Jusko et al 2006 Metrologia 43 04006
Howard McQuoid and Zbigniew Ramotowski 2008 Metrologia 45 04002
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