A Titov et al 2000 Metrologia 37 121 doi:10.1088/0026-1394/37/2/4
Gauge block measurements with nanometre uncertainty
A Titov, I Malinovsky and C A Massone
Show affiliationsA fringe-pattern analysing interferometer with a resolution of 1 × 10-9, stablility of readings of about 0.1 nm, and an uncertainty owing to optical effects of less than 1 nm, has been used to study some systematic effects in gauge block length measurements. Measurements on steel and quartz plates with sub-nanometre reproducibility are reported. An accuracy of about 1 nm is demonstrated for a combination of reproducible wringing and slave-block techniques. The limitations of the present definition of the length of a gauge block are highlighted. A double-sided method for length measurement of gauge blocks has been realized, the results of which are not affected by excessive thickness of the wringing film and which incorporate a correction on the interferometer optics.
- PACS
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06.30.Bp Spatial dimensions (e.g., position, lengths, volume, angles, and displacements)
- Subjects
- Dates
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Issue 2 (April 2000)
An Erratum for this article has been published in 2001 Metrologia 38 195
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Gauge block measurements with nanometre uncertainty
A Titov et al 2000 Metrologia 37 121
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