H Haitjema et al 1996 Metrologia 33 67 doi:10.1088/0026-1394/33/1/9
H Haitjema, H Bosse, M Frennberg, A Sacconi and R Thalmann
Show affiliationsRoundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. The object used for this comparison was a zirconium-oxide sphere with a profile containing higher harmonics and a total roundness deviation of about 42 nm. The measurement results were obtained using different and independent measuring instruments and different evaluation methods for spindle error separation. The number of data points used ranged from 50 to 4096. Before the analysis, the profiles were transformed to a common digital data format containing 1024 points and a correlation analysis was carried out to determine a common zero position for the profiles. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the average profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shows that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.
06.20.Dk Measurement and error theory
Issue 1 (1996)
H Haitjema et al 1996 Metrologia 33 67
B G Vaucher et al 1995 Metrologia 32 79
Yuri Oganessian 2007 J. Phys. G: Nucl. Part. Phys. 34 R165
T V Tscherbul et al 2009 New J. Phys. 11 055021
L Tenorio et al 2008 Inverse Problems 24 034001
J Gomez-Camacho and R C Johnson 1986 J. Phys. G: Nucl. Phys. 12 L235
S Akcöltekin et al 2009 Nanotechnology 20 155601
A G Kontos et al 2009 Nanotechnology 20 045603
F Di Fonzo et al 2009 Nanotechnology 20 015604
Ineke Malsch 1999 Nanotechnology 10 1