Surface Roughness Standards, Obtained with the Scanning Tunneling Microscope Operated at Atmospheric Air Pressure

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Published under licence by IOP Publishing Ltd
, , Citation N García et al 1985 Metrologia 21 135 DOI 10.1088/0026-1394/21/3/005

0026-1394/21/3/135

Abstract

Microstructure surface texture is studied with the Scanning Tunneling Microscope operated at atmospheric air pressure. A standardization procedure for surface microstructure is proposed. We introduce two parameters in order to characterize surface areas in the micrometer and submicrometre range, which we term "granular roughness" and "microroughness". Measurements of a class "0" standard block gauge give a granular roughness Ra value of 0.02 μm.

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10.1088/0026-1394/21/3/005