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Applications of a semiconductor backscattered electron detector in a scanning electron microscope

J Stephen, B J Smith, D C Marshall and E M Wittam

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Describes a solid state backscattered electron detector that has been developed at Harwell for use in a scanning electron microscope. Applications of the method of detection are discussed and examples of the three principal uses are shown. These are in the display of atomic number variations, examination of crystal quality and in topographical examination of insulating specimens.


PACS

07.78.+s Electron, positron, and ion microscopes; electron diffractometers

68.37.Hk Scanning electron microscopy (SEM) (including EBIC)

68.49.Jk Electron scattering from surfaces

Subjects

Instrumentation and measurement

Surfaces, interfaces and thin films

Dates

Issue 7 (July 1975)



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