J Stephen et al 1975 J. Phys. E: Sci. Instrum. 8 607 doi:10.1088/0022-3735/8/7/021
J Stephen, B J Smith, D C Marshall and E M Wittam
Show affiliationsDescribes a solid state backscattered electron detector that has been developed at Harwell for use in a scanning electron microscope. Applications of the method of detection are discussed and examples of the three principal uses are shown. These are in the display of atomic number variations, examination of crystal quality and in topographical examination of insulating specimens.
07.78.+s Electron, positron, and ion microscopes; electron diffractometers
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
Issue 7 (July 1975)
J Stephen et al 1975 J. Phys. E: Sci. Instrum. 8 607
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