J E Greene and J M Whelan 1972 J. Phys. E: Sci. Instrum. 5 975 doi:10.1088/0022-3735/5/10/012
J E Greene and J M Whelan
Show affiliationsAn apparatus is described for the orientation and transfer of single crystals which have well-defined cleavage planes. It is based upon the reflection of a 6328 AA He-Ne laser beam from the cleavage planes. Orientation and subsequent transfer of a GaAs crystal to a wafering machine can be done with a cumulative error of less than 0.15 degrees .
61.50.-f Structure of bulk crystals
42.55.Lt Gas lasers including excimer and metal-vapor lasers
Issue 10 (October 1972)
J E Greene and J M Whelan 1972 J. Phys. E: Sci. Instrum. 5 975
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