Abstract
Reviews existing instrumental techniques suitable for industrial measurement of capacitance in the range 0.1-10 pF, including resonance, oscillation, charge/discharge and AC bridge methods. It shows that in order to achieve high measurement sensitivity and good signal-to-noise ratio, the effects of stray capacitances on the measurement systems must be minimised. Several intrinsically stray-immune measuring circuits are described, including an audio-frequency transformer-ratio-arm bridge and a charge/discharge measuring circuit capable of operating at frequencies up to several MHz. The active guard method and suitable guard driving techniques for reducing the effects of strays on the measurement of grounded capacitances sensors are described. Techniques for reducing the baseline drift of the capacitance measuring circuits, such as auto-balancing and auto-calibration, etc., are also discussed.