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Determination of the thickness and optical constants of amorphous silicon

R Swanepoel

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The rigorous expression for the transmission of a thin absorbing film on a transparent substrate is manipulated to yield formulae in closed form for the refractive index and absorption coefficient. A procedure is presented to calculate the thickness to an accuracy of better than 1% with similar accuracies in the values of n. A method to correct for errors due to slit width is also given. Various formulae to calculate the absorption coefficient accurately over almost three orders of magnitude are discussed. Only data from the transmission spectrum are used and the procedure is simple, fast and very accurate. All formulae are in closed form and can be used on a programmable pocket calculator.


PACS

68.55.-a Thin film structure and morphology

78.20.Ci Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)

78.66.Jg Amorphous semiconductors; glasses

Subjects

Condensed matter: electrical, magnetic and optical

Semiconductors

Surfaces, interfaces and thin films

Dates

Issue 12 (December 1983)



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