Quick search Find article
Quick search
Find article

Determination of the thickness and optical constants of amorphous silicon

R Swanepoel

Show affiliations


The rigorous expression for the transmission of a thin absorbing film on a transparent substrate is manipulated to yield formulae in closed form for the refractive index and absorption coefficient. A procedure is presented to calculate the thickness to an accuracy of better than 1% with similar accuracies in the values of n. A method to correct for errors due to slit width is also given. Various formulae to calculate the absorption coefficient accurately over almost three orders of magnitude are discussed. Only data from the transmission spectrum are used and the procedure is simple, fast and very accurate. All formulae are in closed form and can be used on a programmable pocket calculator.


PACS

68.55.-a Thin film structure and morphology

78.20.Ci Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)

78.66.Jg Amorphous semiconductors; glasses

Subjects

Condensed matter: electrical, magnetic and optical

Semiconductors

Surfaces, interfaces and thin films

Dates

Issue 12 (December 1983)



Related review articles

What's this?
View review articles related to this research to gain an insight into the key trends in this subject area. Related review articles are selected based on PACS/MSC codes, and are no more than three years old.

  1. Ge-on-Si films obtained by epitaxial growing: edge dislocations and their participation in plastic relaxation
  2. The structural analysis possibilities of reflection high energy electron diffraction
  3. Molecular dewetting on insulators

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.