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Measurement of the complex permittivity of thin films in the very low frequency range

T Pisarkiewicz

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A method and an apparatus for measuring the dispersion characteristics of thin-film metal-insulator-metal structures at frequencies below 1 Hz are described. Application of this apparatus makes it possible to study the complex permittivity of thin films having a loss tangent of the order of 10.


PACS

77.22.Ch Permittivity (dielectric function)

77.22.Gm Dielectric loss and relaxation

84.32.Tt Capacitors

73.40.Rw Metal-insulator-metal structures

Subjects

Electronics and devices

Condensed matter: electrical, magnetic and optical

Surfaces, interfaces and thin films

Dates

Issue 3 (March 1979)



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