G Gautherin and C Lejeune 1976 J. Phys. D: Appl. Phys. 9 1149 doi:10.1088/0022-3727/9/7/009
Low-energy ion gun (5-50 eV) for the study of the discharge-surface interactions
G Gautherin and C Lejeune
Show affiliationsThe current density of a low-energy ion beam (5-50 eV) impinging on a target is limited by the space-charge divergence. The ion gun proposed improves the ion bombardment rate in this energy range by one to two orders of magnitude, by reduction of the drift path of the non-neutral un-neutralized beam. A dense plasma, produced by a low-pressure gas discharge, diffuses in a toroidal magnetic field which separates the neutral component of the plasma from its charged component. This latter is transported along the field lines, the neutrality is conserved up to the vicinity of the target where the electrostatic separation and selection of the ions is achieved. The choice of the plasma source permits ions to be delivered from any element. The design is also able to select the projectiles issued from the plasma.
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Issue 7 (11 May 1976)
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Low-energy ion gun (5-50 eV) for the study of the discharge-surface interactions
G Gautherin and C Lejeune 1976 J. Phys. D: Appl. Phys. 9 1149
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