Journal of Physics D: Applied Physics
Volume 42
Number 9
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J Schulze et al 2009 J. Phys. D: Appl. Phys. 42 092005 doi:10.1088/0022-3727/42/9/092005
The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux
FREE ARTICLEJ Schulze, E Schüngel and U Czarnetzki
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