Quick search Find article
Quick search
Find article

A molecular dynamics study of H radical bombardment of CH3 : Si(1 0 0)— comparison of simulation and experiment

FREE ARTICLE

Joseph J Végh1 and David B Graves2

Show affiliations


[1]
Ohta H and Hamaguchi S 2001 J. Chem. Phys. 115 6679
CrossRef 
[2]
Yamada H and Hamaguchi S 2005 Plasma Phys. Control. Fusion 47 A11
IOPscience 
[3]
Smirnov V V, Stengach A V, Gaynullin K G, Pavlovsky V A, Rauf S, Stout P J and Ventzek P L G 2005 J. Appl. Phys. 97 093302
CrossRef 
[4]
Smirnov V V, Stengach A V, Gaynullin K G, Pavlovsky V A, Rauf S, Stout P J and Ventzek P L G 2007 J. Appl. Phys. 101 053307
CrossRef 
[5]
Jang I K and Sinnott S B 2004 J. Phys. Chem. B 108 18993
CrossRef 
[6]
Pregler S K and Sinnott S B 2006 Phys. Rev. B 73 224106
CrossRef 
[7]
Ni B, Lee K H and Sinnott S B 2004 J. Phys.: Condens. Matter 16 7261
IOPscience 
[8]
Abrams C F and Graves D B 1999 IEEE Trans. Plasma Sci. 27 1426
CrossRef 
[9]
Stillinger F H and Weber T A 1985 Phys. Rev. B 31 5262
CrossRef 
[10]
Stillinger F H and Weber T A 1988 J. Chem. Phys. 88 5123
CrossRef 
[11]
Stillinger F H and Weber T A 1989 Phys. Rev. Lett. 62 2144
CrossRef  PubMed 
[12]
Schoolcraft T A and Garrison B J 1990 J. Vac. Sci. Technol. A 8 3496
CrossRef 
[13]
Schoolcraft T A and Garrison B J 1991 J. Am. Chem. Soc. 113 8221
CrossRef 
[14]
Schoolcraft T A, Diehl A M, Steel A B and Garrison B J 1995 J. Vac. Sci. Technol. A 13 1861
CrossRef 
[15]
Weakliem P C, Wu C J and Carter E A 1992 Phys. Rev. Lett. 69 200
CrossRef  PubMed 
[16]
Weakliem P C, Wu C J and Carter E A 1992 Phys. Rev. Lett. 69 1475
CrossRef 
[17]
Humbird D and Graves D B 2004 J. Chem. Phys. 120 2405
CrossRef  PubMed 
[18]
Ramalingam S, Maroudas D and Aydil E S 1998 J. Appl. Phys. 84 3895
CrossRef 
[19]
Sriraman S, Agarwal S, Aydil E S and Maroudas D 2002 Nature 418 62
CrossRef  PubMed 
[20]
Sriraman S, Mahalingam P, Aydil E S and Maroudas D 2003 Surf. Sci. 540 L623
CrossRef 
[21]
Végh J J, Humbird D and Graves D B 2005 J. Vac. Sci. Technol. A 23 1598
CrossRef 
[22]
Végh J J, Humbird D and Graves D B 2008 J. Vac. Sci. Technol. A 26 52
CrossRef 
[23]
Beardmore K and Smith R 1996 Phil. Mag. A 74 1439
CrossRef 
[24]
Tanaka J, Abrams C F and Graves D B 2000 J. Vac. Sci. Technol. A 18 938
CrossRef 
[25]
Brenner D W 1990 Phys. Rev. B 42 9458
CrossRef 
[26]
Murty M V R and Atwater H A 1995 Phys. Rev. B 51 4889
CrossRef 
[27]
Berendsen H J C, Postma J P M, van Gunsteren W F, DiNola A and Haak J R 1984 J. Chem. Phys. 81 3684
CrossRef 
[28]
Cheng C C, Lucas S R, Gutleben H, Choyke W J and Yates J T 1992 Surf. Sci. 273 L441
CrossRef 
[29]
Chuang M C and Coburn J W 1990 J. Vac. Sci. Technol. A 8 1969
CrossRef 
[30]
Dinger A, Lutterloh C and Kuppers J 2001 J. Chem. Phys. 114 5338
CrossRef 
[31]
Abrefah J and Olander D R 1989 Surf. Sci. 209 291
CrossRef 
crossref member

Related review articles

What's this?
View review articles related to this research to gain an insight into the key trends in this subject area. Related review articles are selected based on PACS/MSC codes, and are no more than three years old.

  1. Molecular dynamics for low temperature plasma–surface interaction studies
  2. Dynamics of plasma–surface processes: E–R and L–H atom recombination reactions

View by subject




Export








Please login to access our web services, or create an account if you don't yet have one.

You must have cookies enabled in your web browser to be able to login.

Username
Password

Forgotten your password? Get a new one here.