M M Turner 2009 J. Phys. D: Appl. Phys. 42 194008 doi:10.1088/0022-3727/42/19/194008
M M Turner
Show affiliationsRadio-frequency discharges are practically and scientifically interesting. A practical understanding of such discharges requires, among other things, a quantitative appreciation of the mechanisms involved in heating electrons, since this heating is the proximate cause of the ionization that sustains the plasma. When these discharges are operated at sufficiently low pressure, collisionless electron heating can be an important and even the dominant mechanism. Since the low-pressure regime is important for many applications, understanding collisionless heating is both theoretically and practically important. This review is concerned with the state of theoretical knowledge of collisionless heating in both inductive and capacitive discharges.
Issue 19 (7 October 2009)
Received 26 June 2009, in final form 27 June 2009
Published 18 September 2009
M M Turner 2009 J. Phys. D: Appl. Phys. 42 194008
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