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The status of the database for plasma processing

REVIEW ARTICLE

N J Mason

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REVIEW ARTICLE

Plasma based technologies are one of the largest commercial industries in the world today. To understand the behaviour and properties of such chemically active plasma detailed quantitative information is required for the most important collisional and radiative processes taking place, both in the gas phase and on the surfaces, requiring an enormously detailed database. In this brief review I examine the current status of the current database and identify the most important data needs in future plasma research.


PACS

52.77.-j Plasma applications

52.20.Fs Electron collisions

89.20.Bb Industrial and technological research and development

82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)

52.20.Hv Atomic, molecular, ion, and heavy-particle collisions

89.20.Kk Engineering

Subjects

Plasma physics

Chemical physics and physical chemistry

Dates

Issue 19 (7 October 2009)

Received 15 July 2009, in final form 26 July 2009

Published 18 September 2009



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