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Novel polymer systems for deep UV microlens arrays

A R Mackintosh1, A J C Kuehne1, R A Pethrick1, B Guilhabert2, E Gu2, C L Lee2, M D Dawson2, G Heliotis3 and D D C Bradley3

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We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240–370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 µm and below and are characterized by atomic force microscopy and confocal microscopy.


PACS

85.60.Jb Light-emitting devices

42.79.Bh Lenses, prisms and mirrors

85.40.Hp Lithography, masks and pattern transfer

78.20.Ci Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)

Subjects

Condensed matter: electrical, magnetic and optical

Electronics and devices

Optics, quantum optics and lasers

Dates

Issue 9 (7 May 2008)

Received 28 September 2007, in final form 21 November 2007

Published 4 April 2008



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