J Schulze et al 2008 J. Phys. D: Appl. Phys. 41 195212 doi:10.1088/0022-3727/41/19/195212
J Schulze1, B G Heil1, D Luggenhölscher1, R P Brinkmann2 and U Czarnetzki1
Show affiliationsElectron dynamics in a strongly asymmetric capacitively coupled radio-frequency (RF) discharge at low pressures is investigated by a combination of various diagnostics, analytical models and simulations. Electric fields in the sheath are measured phase and space resolved using fluorescence dip spectroscopy in krypton. The results are compared with a fluid sheath model. Experimentally obtained input parameters are used for the model. The excitation caused by beam-like highly energetic electrons is measured by phase resolved optical emission spectroscopy (PROES) and compared with the results of a hybrid Monte Carlo model based on the electric field resulting from the sheath model. The plasma itself is characterized by Langmuir probe measurements in terms of electron density, electron mean energy and electron energy distribution function (EEDF). The RF voltage and the current to the chamber wall are measured in parallel. At low pressures the plasma series resonance (PSR) effect is observed. It leads to high frequency oscillations of the current (non-sinusoidal RF current waveforms) and, consequently, to a faster sheath expansion. The measured current is compared with an analytical PSR model. Another analytical model using experimentally obtained input parameters determines the influence of beams of highly energetic electrons on the time averaged isotropic EEDF as measured by Langmuir probes. The main result is the observation of beams of highly energetic electrons during the sheath expansion phase, that are enhanced by the PSR effect. The paper shows that the nature of stochastic heating is closely related to electron beams and the PSR effect.
52.50.-b Plasma production and heating
52.70.Ds Electric and magnetic measurements
52.80.Pi High-frequency and RF discharges
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.25.Os Emission, absorption, and scattering of electromagnetic radiation
Issue 19 (7 October 2008)
Received 3 June 2008, in final form 4 August 2008
Published 18 September 2008
J Schulze et al 2008 J. Phys. D: Appl. Phys. 41 195212
D. M. Townsley et al. 2007 ApJ 668 1118
E P Pokatilov et al 2007 J. Phys.: Conf. Ser. 92 012050
J Schulze et al 2009 J. Phys. D: Appl. Phys. 42 092005
N D Zincenco et al 2007 J. Phys.: Conf. Ser. 92 012086
E P Pokatilov et al 2007 J. Phys.: Conf. Ser. 92 012022
V. A. Acciari et al 2009 ApJ 698 L133
Dennis Ziegler et al 2008 Plasma Sources Sci. Technol. 17 045011
Brian George Heil et al 2009 J. Phys. D: Appl. Phys. 42 085205
Fang Peng and Daisuke Nagai 2009 ApJ 705 L58