D W Flaherty 1, M A Kasper 1, J E Baio 1, D B Graves 1, H F Winters 1,3, C Winstead 2 and V McKoy 2
1
Department of Chemical Engineering, University of California, Berkeley, CA 94720, USA
2
A. A. Noyes Laboratory of Chemical Physics, California Institute of Technology, Pasadena, CA 91125, USA
3
Author to whom any correspondence should be addressed.
Journal of Physics D: Applied Physics Create an alert RSS this journal
D W Flaherty et al 2006 J. Phys. D: Appl. Phys. 39 4393
Absolute total dissociation cross sections for electron impact, σt,diss, from 8 to 700 eV are reported for C2F6. A dense set of data was obtained in the technologically important 8–30 eV energy range relevant to modelling the type of plasmas used in both fundamental and applied scientific investigations. The threshold for dissociation was found to be 12.0 ± 0.2 eV and appears to be associated with a Rydberg state. Estimated values for the total neutral dissociation cross section, σneut,diss, were obtained by subtracting the ionization cross sections (all ionizing events cause dissociation) from the total dissociation cross section. It is shown that a calibration error in a paper by one of us (HFW) caused a distortion of several previous investigations. When the data from the present work are used to recalibrate data from swarm experiments, agreement becomes quite reasonable. There is now a consistent set of data obtained from several investigators which describe the dissociation of C2F6. Neutral dissociation cross sections are obtained from electron-impact excitation calculations and found to be in reasonable agreement with measurements over most of the energy range.
34.80.Ht Dissociation and dissociative attachment
06.20.fb Standards and calibration
Issue 20 (21 October 2006)
Received 5 August 2006
,
in final form 29 August 2006
Published 29 September 2006
D W Flaherty et al 2006 J. Phys. D: Appl. Phys. 39 4393