N Ghorbel et al 2005 J. Phys. D: Appl. Phys. 38 1239 doi:10.1088/0022-3727/38/8/022
N Ghorbel1,2, S Fakhfakh1,2, O Jbara1,4, S Odof3, S Rondot1, Z Fakhfakh2 and A Kallel2
Show affiliationsUsing a realistic model for the electric field build-up that takes into account detrapping processes in insulating materials irradiated by electrons, a Monte Carlo approach has been applied to ground-coated binary oxides such as Al2O3 and Nb2O5. Changes entailed by the internal electric field build-up on the generation of the characteristic x-ray quanta and also on backscattered electron emission are investigated. The results clearly show that the depth distribution of characteristic x-ray production is modified and the Φ(ρz) function for both metal and oxygen Kα lines is compressed towards the surface while the backscattering electron emission is roughly unchanged. The change of the x-ray intensities as a function of the electric field is clearly established. The outcome is checked experimentally by measuring simultaneously the trapped charge and the emitted x-ray spectra during electron irradiation.
81.70.Jb Chemical composition analysis, chemical depth and dopant profiling
02.70.Uu Applications of Monte Carlo methods
61.80.Fe Electron and positron radiation effects
Condensed matter: electrical, magnetic and optical
Issue 8 (21 April 2005)
Received 22 September 2004, in final form 10 February 2005
Published 1 April 2005
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