K Fahy et al 2004 J. Phys. D: Appl. Phys. 37 3225 doi:10.1088/0022-3727/37/23/003
K Fahy1, P Dunne1, L McKinney1, G O'Sullivan1, E Sokell1, J White1, A Aguilar2, J M Pomeroy2, J N Tan2, B Blagojević2, E-O LeBigot3 and J D Gillaspy2
Show affiliationsSpectra from xenon ions have been recorded at the NIST electron beam ion trap (EBIT) and the emission into a 2% bandwidth at 13.5 nm arising from 4d → 5p transitions compared with those from 4d → 4f and 4p → 4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of 5 could be gained in photon yield using the UTA rather than the 4d → 5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon, as an EUVL source material.
32.30.Jc Visible and ultraviolet spectra
37.20.+j Atomic and molecular beam sources and techniques
32.70.Cs Oscillator strengths, lifetimes, transition moments
Issue 23 (7 December 2004)
Received 3 July 2004, in final form 8 September 2004
Published 19 November 2004
K Fahy et al 2004 J. Phys. D: Appl. Phys. 37 3225
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