John B Boffard et al 2004 J. Phys. D: Appl. Phys. 37 R143 doi:10.1088/0022-3727/37/12/R01
John B Boffard1, Chun C Lin1 and Charles A DeJoseph Jr2
Show affiliationsMany optical-based plasma diagnostic techniques require electron-impact excitation cross sections. In recent years, a considerable number of new results have become available for excitation of rare-gas atoms from both the ground state and metastable states. Using relatively simple techniques these cross sections can be combined with plasma emission measurements to extract many useful plasma parameters such as the electron temperature. Many of the limitations of simple plasma emission models such as the corona model can be overcome by using cross section measurements to select what particular emission lines to use in the analysis.
52.70.Kz Optical (ultraviolet, visible, infrared) measurements
34.80.Dp Atomic excitation and ionization
Issue 12 (21 June 2004)
Received 8 March 2004
Published 26 May 2004
John B Boffard et al 2004 J. Phys. D: Appl. Phys. 37 R143
T Vestad et al 2004 J. Micromech. Microeng. 14 1503
A Jaroń-Becker et al 2003 J. Phys. B: At. Mol. Opt. Phys. 36 L375
T Bartsch et al 1999 J. Phys. A: Math. Gen. 32 3013
P Ajith et al 2006 Class. Quantum Grav. 23 5825
Jon Links et al 2002 J. Phys. A: Math. Gen. 35 6459
Thomas Nowotny and Ulrich Behn 2001 J. Phys. A: Math. Gen. 34 8057
K Tennakone et al 1995 Semicond. Sci. Technol. 10 1689
Wenli Yang et al 2006 Semicond. Sci. Technol. 21 1573
V Talasila et al 2004 J. Phys. A: Math. Gen. 37 9705