Akihiro Kono 2003 J. Phys. D: Appl. Phys. 36 465 doi:10.1088/0022-3727/36/5/308
Akihiro Kono
Show affiliationsThe conditions at the sheath edge that could lead to instability in the plasma–wall boundary in low-pressure electronegative plasmas are considered in a comprehensive manner. The relevant range of the ratio of the negative ion density to the electron density at the sheath edge was derived on the basis of a fluid model and it was clarified how the parameter range are affected by the positive and negative ion temperatures, by the geometries of plasmas (plane-parallel, cylindrical, and spherical), by the directions of the positive ion flow (converging or diverging), and by the effects of ionization and momentum transfer collisions. It was found that in any geometry the instability would be induced in conditions that could be realized without difficulty in low-pressure plasmas.
52.40.Hf Plasma-material interactions; boundary layer effects
Issue 5 (7 March 2003)
Received 15 November 2002, in final form 12 December 2002
Published 14 February 2003
Akihiro Kono 2003 J. Phys. D: Appl. Phys. 36 465
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