Rajesh Das and Swati Ray 2003 J. Phys. D: Appl. Phys. 36 152 doi:10.1088/0022-3727/36/2/312
Zinc oxide—a transparent, conducting IR-reflector prepared by rf-magnetron sputtering
Rajesh Das and Swati Ray
Show affiliationsAl doped zinc oxide thin films with different electrical and optical properties have been developed by both non-reactive and reactive rf-magnetron sputtering in Ar and Ar+H2 atmospheres, respectively. The thin films prepared under Ar+H2 gas ambient at substrate temperatures of 100°C and 300°C show high conductivity and improved IR-reflectivity. The lowest resistivity obtained is 4.5×10−4 Ω cm at 300°C. The transmission of the ZnO : Al film in the visible range is above 90% and that at 1400 nm is only 3.2%. Most of the IR-region is thus reflected. The carrier concentration of this transparent, conducting ZnO film prepared under Ar+H2 atmosphere is 2.3×1021 cm−3. Tranmission electron micrographs reveal that the average crystallite of the sample deposited under Ar+H2 ambient is smaller compared to those prepared under Ar ambient. The 
100
, 002 orientations of ZnO with wurtzite structure are observed from transmission electron diffraction pattern.
- PACS
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68.37.Lp Transmission electron microscopy (TEM)
- Subjects
- Dates
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Issue 2 (21 January 2003)
Received 23 July 2002
Published 30 December 2002
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Zinc oxide—a transparent, conducting IR-reflector prepared by rf-magnetron sputtering
Rajesh Das and Swati Ray 2003 J. Phys. D: Appl. Phys. 36 152
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The gravitation effect of colliding planar shells of matter
T Dray and G 't Hooft 1986 Class. Quantum Grav. 3 825
-
The classical two-dimensional XY model with in-plane magnetic field
M E Gouvea et al 1990 J. Phys.: Condens. Matter 2 1853
-
Thermal conductivity of metals at high temperatures by the Jain and Krishnan method I. Nickel
S C Jain and T C Goel 1968 J. Phys. D: Appl. Phys. 1 573
-
Finite-element modeling of flextensional electroacoustic transducers
V V Varadan et al 1993 Smart Mater. Struct. 2 201
-
Photoelectric enhancement of electrical conductivity in dust-laden gases
S Guha and P K Kaw 1968 J. Phys. D: Appl. Phys. 1 193
-
Neutron scattering studies of the vibrational spectrum of high-density amorphous ice in comparison with ice Ih and VI
A I Kolesnikov et al 1994 J. Phys.: Condens. Matter 6 375
-
Tailoring of the resonant mode properties of optical nanocavities in two-dimensional photonic crystal slab waveguides
Oskar Painter et al 2001 J. Opt. A: Pure Appl. Opt. 3 S161
-
Practical aspects of aperture-area measurements by superposition of Gaussian laser beams
M Stock and R Goebel 2000 Metrologia 37 633
-
Dirac field in the five-dimensional Kaluza-Klein theory
A Macias and H Dehnen 1991 Class. Quantum Grav. 8 203