M Drakopoulos et al 2003 J. Phys. D: Appl. Phys. 36 A214 doi:10.1088/0022-3727/36/10A/344
M Drakopoulos1, J Zegenhagen1, T-L Lee1, A Snigirev1, I Snigireva1, V Cimalla2 and O Ambacher2
Show affiliationsThe conventional x-ray standing wave (XSW) technique [1, 2] is a phase sensitive and element specific Fourier technique, which is commonly used to analyse single crystals on the millimetre to centimetre scale. Here, we present an advanced microprobe technique based on the XSW method demonstrating that structural analysis can be achieved with chemical sensitivity on a microscopic scale. We apply the XSW microscopy technique to study the crystallographic polarity from inversion domains in GaN-based lateral polarity heterostructures. We focus the x-ray beam by a refractive lens [3] into a micrometre slice and generate the XSW field by Bragg-reflection from the (0002) diffraction planes recording the GaKα fluorescence as a function of the incidence angle. In this first demonstration of microscopic polarity determination with x-rays, we analyse the reversion of polarity across a inversion domain boundary with a spatial resolution of 1.5 μm. The new micro-XSW technique will permit microscopic examinations of the crystalline structure of modern semiconductor devices with chemical sensitivity and structural resolution on the picometre scale.
Issue 10A (21 May 2003)
Received 14 September 2002
Published 28 April 2003
M Drakopoulos et al 2003 J. Phys. D: Appl. Phys. 36 A214
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Julien Brevier et al 2008 Phys. Biol. 5 016005
D P M Zaks et al 2009 Environ. Res. Lett. 4 044010
A. B. Nych et al 2008 EPL 81 16001
Th. Baxevanis 2008 EPL 83 46004
2009 J. Neural Eng. 6 069901
R A Pitts et al 2005 Plasma Phys. Control. Fusion 47 B303
P. Jenniskens and D. F. Blake 1996 ApJ 473 1104
I K Bartol et al 2008 Bioinspir. Biomim. 3 014001