C García-Segundo et al 1998 J. Phys. D: Appl. Phys. 31 165 doi:10.1088/0022-3727/31/2/002
Determination of thin film optical properties by the photoacoustic OPC technique
C García-Segundo
, M Villagrán-Muniz and S Muhl
Through the use of maxima and minima of interference fringes in transmittance spectra registered by the open photoacoustic cell (OPC) detection technique, we have determined the refraction index n and thickness d of aluminium nitride thin films which had previously been deposited on opaque and transparent substrates. The results for the transparent substrate are in agreement with those obtained from the transmission spectra. To determine n as a function of 
we developed a novel procedure for the analysis of the OPC spectra. The n values so obtained were introduced in an appropriate Airy transmittance function, and their numerical evaluation permits the reproduction of the experimental transmittance OPC data and optical curves. This scheme was used to establish the uniqueness of the calculated data.
- PACS
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43.38.+n Transduction; acoustical devices for the generation and reproduction of sound
42.79.Jq Acousto-optical devices
78.20.Hp Piezo-, elasto-, and acoustooptical effects; photoacoustic effects
- Subjects
- Dates
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Issue 2 (21 January 1998)
Received 17 June 1997, in final form 24 September 1997
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Determination of thin film optical properties by the photoacoustic OPC technique
C García-Segundo et al 1998 J. Phys. D: Appl. Phys. 31 165
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