C Michaelsen et al 1997 J. Phys. D: Appl. Phys. 30 3167 doi:10.1088/0022-3727/30/23/001
C Michaelsen
, K Barmak
and T P Weihs§
In this paper we demonstrate the utility of differential scanning calorimetry for investigating the thermodynamics and kinetics of a broad range of thin film reactions. We begin by describing differential scanning calorimeters and the preparation of thin film samples. We then cite a number of examples that illustrate how enthalpies of crystallization, heats of formation and enthalpies of interfaces can be measured using layered thin films of Ni/Al, Cu/Zr and Zr/Al and homogeneous thin films of Co - Si, Nb - Cu, Cr - Cu and Ge - Sn. Following these examples of thermodynamic measurements, we show how kinetic parameters of nucleation, growth and coarsening can also be determined from differential scanning calorimetry traces using layered thin films of Ni/Al, Ti/Al and Nb/Al and homogenous thin films of Co - Si and Ge - Sn. The thermodynamic and kinetic investigations highlighted in these examples demonstrate that one can characterize phase transformations that are relevant to commercial applications and scientific studies both of thin films and of bulk materials.
82.60.Fa Heat capacities and heats of phase transitions
81.15.Jj Ion and electron beam-assisted deposition; ion plating
82.60.Cx Enthalpies of combustion, reaction, and formation
64.70.D- Solid–liquid transitions
82.60.Nh Thermodynamics of nucleation
81.15.Cd Deposition by sputtering
Soft matter, liquids and polymers
Surfaces, interfaces and thin films
Issue 23 (7 December 1997)
Received 15 July 1997
C Michaelsen et al 1997 J. Phys. D: Appl. Phys. 30 3167
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