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Investigating the thermodynamics and kinetics of thin film reactions by differential scanning calorimetry

REVIEW ARTICLE

C Michaelsen-+, K Barmak++ and T P Weihs§

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REVIEW ARTICLE

In this paper we demonstrate the utility of differential scanning calorimetry for investigating the thermodynamics and kinetics of a broad range of thin film reactions. We begin by describing differential scanning calorimeters and the preparation of thin film samples. We then cite a number of examples that illustrate how enthalpies of crystallization, heats of formation and enthalpies of interfaces can be measured using layered thin films of Ni/Al, Cu/Zr and Zr/Al and homogeneous thin films of Co - Si, Nb - Cu, Cr - Cu and Ge - Sn. Following these examples of thermodynamic measurements, we show how kinetic parameters of nucleation, growth and coarsening can also be determined from differential scanning calorimetry traces using layered thin films of Ni/Al, Ti/Al and Nb/Al and homogenous thin films of Co - Si and Ge - Sn. The thermodynamic and kinetic investigations highlighted in these examples demonstrate that one can characterize phase transformations that are relevant to commercial applications and scientific studies both of thin films and of bulk materials.


PACS

81.70.Pg Thermal analysis, differential thermal analysis (DTA), differential thermogravimetric analysis

82.60.Fa Heat capacities and heats of phase transitions

81.15.Jj Ion and electron beam-assisted deposition; ion plating

82.60.Cx Enthalpies of combustion, reaction, and formation

64.70.D- Solid–liquid transitions

82.60.Nh Thermodynamics of nucleation

81.15.Cd Deposition by sputtering

68.60.Dv Thermal stability; thermal effects

82.60.Lf Thermodynamics of solutions

Subjects

Soft matter, liquids and polymers

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Chemical physics and physical chemistry

Dates

Issue 23 (7 December 1997)

Received 15 July 1997



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