F Machalett and R Muhle 1994 J. Phys. D: Appl. Phys. 27 1286 doi:10.1088/0022-3727/27/6/028
F Machalett and R Muhle
Show affiliationsFor generation of Cu and Pd ions in liquid metal ion sources Cu-Ga, Cu-Ge, Pd-Ge, Pd-Si and Pd-Sn alloys have been tested as source feed materials. The range of coexistence of solid and liquid phases and the eutectic temperature of the investigated alloys were determined by differential thermal analysis. A stable operation of liquid metal ion sources could be obtained with Cu63.5Ge36.5 (at.%) and Pd36Ge64 (at.%) alloys. The recorded mass spectrum of a Cu63.5Ge36.5 liquid metal ion source has shown a high current of Cu+ ions. The high current of Pd+ ions in the mass spectrum of the Pd36Ge64 liquid metal ion source shows that this alloy is a suitable source material for Pd ion generation. An investigation of the ion flux ratio, which depends on the total source current, has revealed a maximum intensity of doubly charged ions in the low-current region. The fraction of doubly charged Cu and Pd ions is less than 1%.
81.05.Bx Metals, semimetals, and alloys
Issue 6 (14 June 1994)
F Machalett and R Muhle 1994 J. Phys. D: Appl. Phys. 27 1286
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