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Probing dynamic processes in multilayered structures by stimulated spectroscopic ellipsometry

G Jin, J P Roger, A C Boccara and J L Stehle

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Spectroscopic ellipsometry is a widely used technique for the determination of the optical and geometrical characteristics of complex multilayered structures. We show in this communication that photostimulated ellipsometry is able to account for the time (or frequency) dependence of heat and carrier diffusion processes in such structures. The results of various experiments on SIMOX structures are reported.


PACS

68.65.Ac Multilayers

78.67.Pt Multilayers; superlattices

07.60.Fs Polarimeters and ellipsometers

Subjects

Instrumentation and measurement

Surfaces, interfaces and thin films

Nanoscale science and low-D systems

Dates

Issue 11 (14 November 1993)



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