G Jin et al 1993 J. Phys. D: Appl. Phys. 26 2096 doi:10.1088/0022-3727/26/11/039
G Jin, J P Roger, A C Boccara and J L Stehle
Show affiliationsSpectroscopic ellipsometry is a widely used technique for the determination of the optical and geometrical characteristics of complex multilayered structures. We show in this communication that photostimulated ellipsometry is able to account for the time (or frequency) dependence of heat and carrier diffusion processes in such structures. The results of various experiments on SIMOX structures are reported.
Instrumentation and measurement
Issue 11 (14 November 1993)
G Jin et al 1993 J. Phys. D: Appl. Phys. 26 2096
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