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Surface effects on laser-induced damage in Si

A Vohra, S K Bansal, R K Sharma, G P Srivastava, C L Garg and R P Mull

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The present work describes an experimental study of damage to n-type silicon caused by a normal Nd:glass laser of 1.06 mu m wavelength, running in free-generation mode. Samples of different surface quality were prepared by mechanical lapping, chemical etching and polishing by fine diamond paste. This was done to study the effect of mechanical damage at the sample surface introduced during sample preparation. Damage morphology observed at different power densities shows that in the case of lapped samples the laser damage threshold is considerably lower than that of mirror-polished samples. Damage threshold results are analysed in terms of a thermal model taking into account the differences in the physical parameters of different samples and the temperature dependence of those parameters. The mechanical damage caused at the sample surface during its preparation results in an increase of surface absorptance of Si and consequently lowers its damage threshold. The evolution of damage morphology is governed by the depth of the mechanical damage.


PACS

61.80.Ba Ultraviolet, visible, and infrared radiation effects (including laser radiation)

68.47.Fg Semiconductor surfaces

81.65.Ps Polishing, grinding, surface finishing

61.82.Fk Semiconductors

42.55.Rz Doped-insulator lasers and other solid state lasers

81.70.-q Methods of materials testing and analysis

81.65.Cf Surface cleaning, etching, patterning

79.20.Ds Laser-beam impact phenomena

Subjects

Condensed matter: electrical, magnetic and optical

Semiconductors

Surfaces, interfaces and thin films

Optics, quantum optics and lasers

Condensed matter: structural, mechanical & thermal

Dates

Issue 1 (14 January 1990)



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