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A study of Ag adsorption on Si(111) surfaces by a compact arrangement of Na+ ISS and LEED

F Shoji, M Watamori, T Kuroi, K Oura and T Hanawa

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A combined technique of low-energy Na+ ion scattering spectroscopy (Na+ ISS) and low-energy electron diffraction is applied to study the initial growth process of Ag films on Si(111) surfaces. In comparison with results obtained by Auger electron spectroscopy, the Na+ ISS is also found to reflect reasonably well the Stranski-Krastanov growth mode or the Frank van der Merwe growth mode. Moreover, owing to the extreme sensitivity of the outermost surface layer, the Na+ ISS gives information on changes in the surface morphology induced by the Ag adsorption and subsequent annealing.


PACS

68.43.Mn Adsorption kinetics

79.20.Fv Electron impact: Auger emission

68.49.Sf Ion scattering from surfaces (charge transfer, sputtering, SIMS)

68.55.A- Nucleation and growth

78.66.Bz Metals and metallic alloys

68.47.Fg Semiconductor surfaces

81.40.Ef Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization

79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces

Subjects

Condensed matter: electrical, magnetic and optical

Semiconductors

Surfaces, interfaces and thin films

Condensed matter: structural, mechanical & thermal

Dates

Issue 1 (14 January 1989)



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