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A simple tunable KrF laser system with narrow bandwidth and diffraction-limited divergence

R G Caro, M C Gower and C E Webb

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The authors present design and performance details of a simple discharge-excited KrF laser system comprising a slave oscillator injection-locked by a low power master oscillator. A single spark gap is used to control both discharges resulting in reliable synchronisation and sub-nanosecond jitter. The master oscillator is controlled by a cavity employing a grazing incidence grating and can be tuned over the full lasing bandwidth of the oscillator by adjusting only a single micrometer while producing linewidths less than 0.3 cm-1. The laser system is tunable from 248.05 nm to 248.58 nm. Up to 90% of the 5 MW output can be obtained in a single narrow line. The divergence of the output beam is close to the diffraction limit.


PACS

42.55.Lt Gas lasers including excimer and metal-vapor lasers

42.60.By Design of specific laser systems

42.65.Re Ultrafast processes; optical pulse generation and pulse compression

52.80.Mg Arcs; sparks; lightning; atmospheric electricity

42.60.Lh Efficiency, stability, gain, and other operational parameters

42.60.Da Resonators, cavities, amplifiers, arrays, and rings

Subjects

Optics, quantum optics and lasers

Plasma physics

Dates

Issue 5 (14 May 1982)



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