P A B Toombs 1968 J. Phys. D: Appl. Phys. 1 662 doi:10.1088/0022-3727/1/5/418
P A B Toombs
Show affiliationsIt is sometimes believed that there is a danger of sputtering earthed parts of a single-ended r.f. sputtering system and that this danger can be avoided by using a double-target balanced system. This is not the case, since both systems are shown to be electrically similar. The energy of positive ions bombarding earthed surfaces in either system is likely to be very much less than 20 ev if the area of the earthed surface in contact with the plasma is as large as, or larger than, that of the target.
79.20.Rf Atomic, molecular, and ion beam impact and interactions with surfaces
Issue 5 (May 1968)
Received 25 September 1967
P A B Toombs 1968 J. Phys. D: Appl. Phys. 1 662
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